Invention Grant
- Patent Title: Electroplating apparatus and method with uniformity improvement
- Patent Title (中): 电镀装置和均匀性改进方法
-
Application No.: US12273289Application Date: 2008-11-18
-
Publication No.: US09334578B2Publication Date: 2016-05-10
- Inventor: Naoki Takeguchi
- Applicant: Naoki Takeguchi
- Applicant Address: US CA San Jose
- Assignee: Cypress Semiconductor Corporation
- Current Assignee: Cypress Semiconductor Corporation
- Current Assignee Address: US CA San Jose
- Main IPC: C25D21/12
- IPC: C25D21/12 ; C25D7/12 ; C25D17/00 ; C25D5/18 ; C25D17/12

Abstract:
An electroplating system is provided. The electroplating system includes a divided electrode that is arranged to simultaneously provide a plurality of line currents for an electroplating process. The system includes a current control component that is coupled to the divided electrode. The current control component is configured to determine the magnitude of each of the line currents. The current control component is also configured to regulate individual line currents based, at least in part, on the determined magnitude of each of the line currents.
Public/Granted literature
- US20100122908A1 ELECTROPLATING APPARATUS AND METHOD WITH UNIFORMITY IMPROVEMENT Public/Granted day:2010-05-20
Information query