Invention Grant
US09334578B2 Electroplating apparatus and method with uniformity improvement 有权
电镀装置和均匀性改进方法

Electroplating apparatus and method with uniformity improvement
Abstract:
An electroplating system is provided. The electroplating system includes a divided electrode that is arranged to simultaneously provide a plurality of line currents for an electroplating process. The system includes a current control component that is coupled to the divided electrode. The current control component is configured to determine the magnitude of each of the line currents. The current control component is also configured to regulate individual line currents based, at least in part, on the determined magnitude of each of the line currents.
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