Invention Grant
- Patent Title: Temperature system having an impurity filter
- Patent Title (中): 具有杂质过滤器的温度系统
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Application No.: US13274967Application Date: 2011-10-17
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Publication No.: US09335080B2Publication Date: 2016-05-10
- Inventor: Britton N. Ward , Norbert W. Elsdoerfer
- Applicant: Britton N. Ward , Norbert W. Elsdoerfer
- Applicant Address: US MA Mansfield
- Assignee: Temptronic Corporation
- Current Assignee: Temptronic Corporation
- Current Assignee Address: US MA Mansfield
- Agency: Burns & Levinson, LLP
- Agent Steven M. Mills
- Main IPC: F25B47/00
- IPC: F25B47/00 ; F25B43/00 ; H05K7/20 ; F25B19/00 ; H01L23/467 ; H01L23/473

Abstract:
A temperature control system for controlling a temperature of a device under test includes a fluid source and a cooling device reducing a temperature of the fluid supplied by the fluid source and outputting the fluid having the reduced temperature to a device under test. A filter is positioned between the device under test and the cooling device to filter out ice particles that lead to significant charge generation in order to prevent the device under test from being subjected to high voltages as a result of static charge generation.
Public/Granted literature
- US20130092356A1 TEMPERATURE SYSTEM HAVING AN IMPURITY FILTER Public/Granted day:2013-04-18
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