Invention Grant
- Patent Title: MEMS component
- Patent Title (中): MEMS组件
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Application No.: US14012804Application Date: 2013-08-28
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Publication No.: US09335203B2Publication Date: 2016-05-10
- Inventor: Jochen Zoellin , Ricardo Ehrenpfordt , Juergen Graf , Christoph Schelling , Frederik Ante , Michael Curcic
- Applicant: Jochen Zoellin , Ricardo Ehrenpfordt , Juergen Graf , Christoph Schelling , Frederik Ante , Michael Curcic
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01H11/06 ; G01H13/00

Abstract:
A new signal acquisition concept is provided for MEMS components having a pressure-sensitive diaphragm element, which at least partially spans a pressure connection opening. This signal acquisition concept is distinguished by an especially high sensitivity. For this purpose, the MEMS component includes a resonant vibrator device having a vibrating element, which is suspended, capable of vibrating, within a closed cavity and is equipped with at least one drive electrode and at least one sensing electrode. The vibrating element of the resonant vibrator device is coupled mechanically to the diaphragm element, so that the vibrating element is deformed in the case of a diaphragm deflection.
Public/Granted literature
- US20150059482A1 MEMS COMPONENT Public/Granted day:2015-03-05
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