Invention Grant
US09335240B2 Method of measuring an interaction force 有权
测量相互作用力的方法

Method of measuring an interaction force
Abstract:
A system and method of measuring an interaction force is disclosed. One embodiment includes providing a method of measuring an interaction force including providing a microelectromechanical transducer. The transducer includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a differential capacitive displacement sensor to provide a sensor output signal representative of an interaction force on the probe. The probe is moved relative to a sample surface. An interaction force is determined between the probe and the sample surface using the sensor output, as the probe is moved relative to the sample surface.
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