Invention Grant
- Patent Title: Method of measuring an interaction force
- Patent Title (中): 测量相互作用力的方法
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Application No.: US13688034Application Date: 2012-11-28
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Publication No.: US09335240B2Publication Date: 2016-05-10
- Inventor: Yunje Oh , Ryan Major , Douglas Stauffer , Syed Amanula Syed Asif
- Applicant: Hysitron Incorporated
- Applicant Address: US MN Eden Prairie
- Assignee: Hysitron Incorporated
- Current Assignee: Hysitron Incorporated
- Current Assignee Address: US MN Eden Prairie
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: G01N3/48
- IPC: G01N3/48 ; G01N3/42 ; B82Y35/00 ; G01Q60/36

Abstract:
A system and method of measuring an interaction force is disclosed. One embodiment includes providing a method of measuring an interaction force including providing a microelectromechanical transducer. The transducer includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a differential capacitive displacement sensor to provide a sensor output signal representative of an interaction force on the probe. The probe is moved relative to a sample surface. An interaction force is determined between the probe and the sample surface using the sensor output, as the probe is moved relative to the sample surface.
Public/Granted literature
- US20130098145A1 METHOD OF MEASURING AN INTERACTION FORCE Public/Granted day:2013-04-25
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