Invention Grant
- Patent Title: Helmholtz type differential acoustic resonator detection device
- Patent Title (中): 亥姆霍兹型差动声谐振器检测装置
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Application No.: US14677222Application Date: 2015-04-02
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Publication No.: US09335259B2Publication Date: 2016-05-10
- Inventor: Alain Gliere , Salim Boutami , Mickael Brun , Pierre Labeye , Sergio Nicoletti , Justin Rouxel
- Applicant: Commissariat A L'Energie Atomique et aux Energies Alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1453101 20140408
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/3504 ; G01N21/03 ; H01S5/026 ; G01N29/036 ; G01N29/22 ; G01N29/24 ; G01N21/17

Abstract:
Microelectronic photoacoustic detection device comprising: a substrate comprising cavities forming a Helmholtz differential acoustic resonator; acoustic detectors coupled to the chambers of the resonator; a light source; a waveguide comprising a first end coupled to the light source and a second end coupled to a first chamber; in which the second end comprises, at the interface with the first chamber, a width greater than that of the first end and that of the given wavelength, and/or in which the device comprises a diffraction grating arranged in the second end and capable of diffracting a first part of the beam towards a lower reflective layer arranged under the second end and a second part of the beam towards an upper reflective layer arranged at an upper wall of the first chamber.
Public/Granted literature
- US20150285737A1 HELMHOLTZ TYPE DIFFERENTIAL ACOUSTIC RESONATOR DETECTION DEVICE Public/Granted day:2015-10-08
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