Invention Grant
US09335367B2 Implementing low temperature wafer test 有权
实施低温晶圆试验

Implementing low temperature wafer test
Abstract:
A method and structure are provided for implementing low temperature wafer testing of a completed wafer. A coolant gel is applied to the completed wafer, the gel coated wafer is cooled and one or more electrical test probes are applied through the gel to electrical contacts of the cooled wafer, and testing is performed.
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