Invention Grant
- Patent Title: Template and pattern forming method
-
Application No.: US12760282Application Date: 2010-04-14
-
Publication No.: US09335627B2Publication Date: 2016-05-10
- Inventor: Yukiko Kikuchi , Shinichi Ito
- Applicant: Yukiko Kikuchi , Shinichi Ito
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JP2009-219687 20090924
- Main IPC: B29C59/02
- IPC: B29C59/02 ; G03F7/00 ; H01L21/768 ; H01L23/00 ; H01L23/544 ; H01L23/58
Abstract:
A template for imprinting in which a pattern is transferred onto a first substrate applied curable resin thereon, including a second substrate having a surface to be contacted with the curable resin, a concave portion provided on the surface and corresponding to a pattern to be transferred onto the first substrate, and at least one convex portion arranged in the concave portion to decrease volume of the concave portion.
Public/Granted literature
- US20110070733A1 TEMPLATE AND PATTERN FORMING METHOD Public/Granted day:2011-03-24
Information query
