Invention Grant
- Patent Title: Coarse grid design methods and structures
- Patent Title (中): 粗网格设计方法和结构
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Application No.: US14187088Application Date: 2014-02-21
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Publication No.: US09336344B2Publication Date: 2016-05-10
- Inventor: Michael C. Smayling , Scott T. Becker
- Applicant: Tela Innovations, Inc.
- Applicant Address: US CA Los Gatos
- Assignee: Tela Innovations, Inc.
- Current Assignee: Tela Innovations, Inc.
- Current Assignee Address: US CA Los Gatos
- Agency: Martine Penilla Group, LLP
- Main IPC: H01L27/10
- IPC: H01L27/10 ; G06F17/50 ; H01L21/027 ; H01L27/02 ; G03F7/20 ; H01L27/105

Abstract:
A layer of a mask material is deposited on a substrate. A beam of energy is scanned across the mask material in a rasterized linear pattern and in accordance with a scan pitch that is based on a pitch of conductive structure segments to be formed on the substrate. The beam of energy is defined to transform the mask material upon which the beam of energy is incident into a removable state. During scanning the beam of energy across the mask material, the beam of energy is turned on at locations where a conductive structure is to be formed on the substrate, and the beam of energy is turned off at locations where a conductive structure is not to be formed on the substrate.
Public/Granted literature
- US20140167183A1 Coarse Grid Design Methods and Structures Public/Granted day:2014-06-19
Information query
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