Invention Grant
- Patent Title: Apparatus and methods for molding die on wafer interposers
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Application No.: US14055599Application Date: 2013-10-16
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Publication No.: US09337096B2Publication Date: 2016-05-10
- Inventor: Chung Yu Wang , Chih-Wei Wu , Szu Wei Lu , Jing-Cheng Lin
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L21/78
- IPC: H01L21/78 ; H01L25/065 ; H01L21/56 ; H01L23/00 ; H01L23/16 ; H01L23/31

Abstract:
Methods and apparatus for performing molding on die on wafer interposers. A method includes receiving an interposer assembly having a die side and an opposite side including two or more integrated circuit dies mounted on the die side of the interposer, the interposer assembly having spaces formed on the die side of the interposer between the two or more integrated circuit dies; mounting at least one stress relief feature on the die side of the interposer assembly in one of the spaces between the two or more integrated circuit dies; and molding the integrated circuit dies using a mold compound, the mold compound surrounding the two or more integrated circuit dies and the at least one stress relief feature. An apparatus is disclosed having integrated circuits mounted on a die side of an interposer, stress relief features between the integrated circuits and mold compound over the integrated circuits.
Public/Granted literature
- US20140038360A1 Apparatus and Methods for Molding Die on Wafer Interposers Public/Granted day:2014-02-06
Information query
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