Invention Grant
US09337101B1 Methods for selectively removing a fin when forming FinFET devices
有权
在形成FinFET器件时选择性地去除鳍片的方法
- Patent Title: Methods for selectively removing a fin when forming FinFET devices
- Patent Title (中): 在形成FinFET器件时选择性地去除鳍片的方法
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Application No.: US14674549Application Date: 2015-03-31
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Publication No.: US09337101B1Publication Date: 2016-05-10
- Inventor: Min Gyu Sung , Hoon Kim , Chanro Park , Ruilong Xie
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L21/308 ; H01L21/3065

Abstract:
One illustrative method disclosed herein includes, among other things, forming a plurality of fins in a semiconducting substrate, each of which has a corresponding masking layer feature positioned thereabove, forming a masking layer that has an opening that exposes at least two fins of the plurality of fins, performing an angled etching process through the opening in the masking layer so as to remove the masking layer feature formed above one of the at least two exposed fins, and thereby define an exposed fin, while leaving the masking layer feature intact above the other of the at least two exposed fins, and performing an anisotropic etching process through the opening in the masking layer to remove the exposed fin while leaving the other of the at least two exposed fins intact.
Information query
IPC分类: