Invention Grant
US09337116B2 Semiconductor device and method of forming stepped interposer for stacking and electrically connecting semiconductor die 有权
用于堆叠和电连接半导体管芯的阶梯式插入器的半导体器件和方法

Semiconductor device and method of forming stepped interposer for stacking and electrically connecting semiconductor die
Abstract:
A semiconductor substrate has a plurality of different size recesses formed in the substrate to provide a stepped interposer. A conductive via can be formed through the stepped interposer. An insulating layer follows a contour of the stepped interposer. A conductive layer is formed over the insulating layer following the contour of the stepped interposer. A first semiconductor die is partially disposed in a first recess and electrically connected to the conductive layer. A second semiconductor die is partially disposed in a second recess and electrically connected to the conductive layer. The first semiconductor die is electrically connected to the second semiconductor die through the conductive layer. The first and second semiconductor die can be flipchip type semiconductor die. An encapsulant is deposited over the first and second semiconductor die. A portion of the stepped interposer can be removed to reduce thickness.
Information query
Patent Agency Ranking
0/0