A semiconductor device includes a substrate comprising a front surface, side surfaces, a back surface, and a recessed edge between the side surfaces and either the front surface or the back surface, the front surface comprising an active region, the active region comprising at least one contact pad, a polymeric member disposed and contacted with the recessed edge of the substrate, a mold disposed over the front surface of the substrate and the polymeric member, and an interface between the mold and the polymeric member.