Invention Grant
- Patent Title: Group-III nitride structure
- Patent Title (中): III族氮化物结构
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Application No.: US14410004Application Date: 2013-06-26
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Publication No.: US09337389B2Publication Date: 2016-05-10
- Inventor: Anders Lundskog , Chih-Wei Hsu , Fredrik Karlsson
- Applicant: Polar Light Technologies AB
- Applicant Address: SE Linköping
- Assignee: POLAR LIGHT TECHNOLOGIES AB
- Current Assignee: POLAR LIGHT TECHNOLOGIES AB
- Current Assignee Address: SE Linköping
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: SE1200384 20120626
- International Application: PCT/EP2013/063362 WO 20130626
- International Announcement: WO2014/001380 WO 20140103
- Main IPC: H01L33/24
- IPC: H01L33/24 ; H01L33/00 ; H01L33/06 ; H01L33/18 ; H01L33/32 ; H01L33/16 ; H01L33/20

Abstract:
Group-III nitride structure comprising at least one structure pyramid having a base having at least four sides. The structure pyramid comprises an inner pyramid having a base having at least four sides, which inner pyramid is made of a first group-III nitride. The inner pyramid is coated with an inner first layer made of a second group-III nitride and an outer second layer made of a third group-III nitride, wherein the second group-III nitride has a lower band gap than the first group-III nitride and a lower band gap than the third group-III nitride. The base of the structure pyramid is elongated resulting in an upper ridge creating at least one anisotropic quantum dot.Method for producing a group-III nitride structure comprising providing a substrate; providing a masking film on the substrate, which film comprises at least one elongated aperture; growth of a first group-III nitride on the substrate; deposition of an inner first layer of a second group-III nitride on the first group-III nitride; deposition of an outer second layer of a third group-III nitride on the second group-III nitride, wherein the second group-III nitride has a lower band gap than the first group-III nitride and a lower band gap than the third group-III nitride.
Public/Granted literature
- US20150144869A1 GROUP-III NITRIDE STRUCTURE Public/Granted day:2015-05-28
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