Invention Grant
- Patent Title: Actuator, optical scanner, and image forming apparatus
- Patent Title (中): 执行机构，光学扫描仪和图像形成装置
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Application No.: US13442318Application Date: 2012-04-09
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Publication No.: US09337711B2Publication Date: 2016-05-10
- Inventor: Makiko Hino , Yasushi Mizoguchi
- Applicant: Makiko Hino , Yasushi Mizoguchi
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2011-087764 20110411
- Main IPC: G06F3/12
- IPC: G06F3/12 ; H02K33/16 ; G02B26/10 ; H04N3/08 ; G02B7/182 ; B81B3/00 ; G06F15/00 ; G02B26/08 ; G03B27/52
Abstract:
An actuator including a movable portion that swings about a swing axis, a connecting portion that extends from the movable portion and torsionally deforms in response to the swinging of the movable portion, and a support portion that supports the connecting portion, wherein the movable portion is so shaped that the length thereof parallel to the swing axis decreases stepwise with distance from the swing axis in a plan view, and the movable portion, the support portion, and the connecting portion are formed by anisotropically etching a silicon substrate.
Public/Granted literature
- US20120257235A1 ACTUATOR, OPTICAL SCANNER, AND IMAGE FORMING APPARATUS Public/Granted day:2012-10-11
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