Invention Grant
US09337801B2 Vibration element, vibrator, oscillator, electronic apparatus, and moving object
有权
振动元件,振动器,振荡器,电子设备和移动物体
- Patent Title: Vibration element, vibrator, oscillator, electronic apparatus, and moving object
- Patent Title (中): 振动元件,振动器,振荡器,电子设备和移动物体
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Application No.: US14227332Application Date: 2014-03-27
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Publication No.: US09337801B2Publication Date: 2016-05-10
- Inventor: Masayuki Kikushima , Masako Tanaka , Naohisa Obata , Yukihiro Unno
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2013-075013 20130329
- Main IPC: H03B5/32
- IPC: H03B5/32 ; H03H9/05 ; H03H9/17 ; H01L41/053 ; H01L41/09 ; H03H9/10

Abstract:
A vibration element includes a piezoelectric substrate including a vibrating section and a thick section having a thickness larger than that of the vibrating section. The thick section includes a first thick section provided along a first outer edge of the vibrating section, a second thick section provided along a second outer edge thereof, and a third thick section provided along a third outer edge thereof. When a maximum size of the second thick section in the vibration direction is Lmax and a minimum size thereof is Lmin, an average size expressed by (Lmax+Lmin)/2 is 100 μm or smaller.
Public/Granted literature
- US20140292436A1 VIBRATION ELEMENT, VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT Public/Granted day:2014-10-02
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