Invention Grant
- Patent Title: Normally closed microelectromechanical switches (MEMS), methods of manufacture and design structures
- Patent Title (中): 常闭微机电开关（MEMS），制造方法和设计结构
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Application No.: US14081017Application Date: 2013-11-15
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Publication No.: US09343255B2Publication Date: 2016-05-17
- Inventor: Dawn D. Hall , Mark C. H. Lamorey , Anthony K. Stamper
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Steven Meyers; Andrew M. Calderon
- Main IPC: H01H51/22
- IPC: H01H51/22 ; H01H59/00 ; H01H11/00 ; G06F17/50
Abstract:
Normally closed (shut) micro-electro-mechanical switches (MEMS), methods of manufacture and design structures are provided. A structure includes a beam structure that includes a first end hinged on a first electrode and in electrical contact with a second electrode, in its natural state when not actuated.
Public/Granted literature
- US20140070340A1 NORMALLY CLOSED MICROELECTROMECHANICAL SWITCHES (MEMS), METHODS OF MANUFACTURE AND DESIGN STRUCTURES Public/Granted day:2014-03-13
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