Invention Grant
US09346665B2 MEMS vibrator, method of manufacturing MEMS vibrator, electronic device, and moving object
有权
MEMS振动器，制造MEMS振动器的方法，电子装置和移动物体
- Patent Title: MEMS vibrator, method of manufacturing MEMS vibrator, electronic device, and moving object
- Patent Title (中): MEMS振动器，制造MEMS振动器的方法，电子装置和移动物体
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Application No.: US14191884Application Date: 2014-02-27
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Publication No.: US09346665B2Publication Date: 2016-05-24
- Inventor: Takuya Kinugawa , Akinori Yamada
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2013-040408 20130301
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81B3/00 ; G01P15/097
Abstract:
A MEMS vibrator includes an insulating portion, a first electrode provided on one surface of the insulating portion, a fixed portion, and a function portion, a second electrode provided so that at least a portion thereof overlaps the first electrode at a distance therefrom. The second electrode comes into contact with the function portion and extends from the fixed portion.
Public/Granted literature
- US20140246737A1 MEMS VIBRATOR, METHOD OF MANUFACTURING MEMS VIBRATOR, ELECTRONIC DEVICE, AND MOVING OBJECT Public/Granted day:2014-09-04
Information query
IPC分类:
