Invention Grant
- Patent Title: Tilted gratings and method for production of tilted gratings
- Patent Title (中): 倾斜光栅和倾斜光栅的生产方法
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Application No.: US13319196Application Date: 2010-06-09
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Publication No.: US09348067B2Publication Date: 2016-05-24
- Inventor: Gereon Vogtmeier , Klaus Juergen Engel , Thomas Koehler , Ewald Roessl
- Applicant: Gereon Vogtmeier , Klaus Juergen Engel , Thomas Koehler , Ewald Roessl
- Applicant Address: NL Eindhoven
- Assignee: KONINKLIJKE PHILIPS N.V.
- Current Assignee: KONINKLIJKE PHILIPS N.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP09162787 20090616
- International Application: PCT/IB2010/052555 WO 20100609
- International Announcement: WO2010/146498 WO 20101223
- Main IPC: G21K1/00
- IPC: G21K1/00 ; G02B5/18 ; A61B6/00
Abstract:
The present invention relates to phase-contrast imaging which visualizes the phase information of coherent radiation passing a scanned object. Focused gratings are used which reduce the creation of trapezoid profile in a projection with a particular angle to the optical axis. A laser supported method is used in combination with a dedicating etching process for creating such focused grating structures.
Public/Granted literature
- US20120057677A1 TILTED GRATINGS AND METHOD FOR PRODUCTION OF TILTED GRATINGS Public/Granted day:2012-03-08
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