Invention Grant
US09349601B2 Ruthenium complex, method for producing same, and method for producing ruthenium-containing thin film 有权
钌络合物,其制造方法以及含钌薄膜的制造方法

Ruthenium complex, method for producing same, and method for producing ruthenium-containing thin film
Abstract:
The present invention is to provide a ruthenium complex represented by formula (1a), (2), (3), etc., which is useful for producing a ruthenium-containing thin film both under the conditions using an oxidizing gas as the reaction gas and under the conditions using a reducing gas as the reaction gas: wherein R1a to R7a, R8, R9 and R10 to R18 represents an alkyl group having a carbon number of 1 to 6, etc., and n represents an integer of 0 to 2.
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