Invention Grant
US09349736B2 Method for manufacturing high-strength structural stacked capacitor 有权
高强度结构堆叠电容器的制造方法

Method for manufacturing high-strength structural stacked capacitor
Abstract:
The instant disclosure relates to a method for manufacturing high-strength structural stacked capacitor. The novel feature of the instant disclosure is forming a part of upper electrode layer to cover the first/outer surface of each of the lower electrode layers before removing the sacrificial layer, and forming another part of upper electrode layer to cover the second/inner surface of each of the lower electrode layers after removing the sacrificial layer. Hence, the structure strength of the lower electrode layer in all process steps has been improved.
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