Invention Grant
- Patent Title: Method and system for diamond-based oxygen sensor
- Patent Title (中): 基于金刚石氧传感器的方法和系统
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Application No.: US14828718Application Date: 2015-08-18
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Publication No.: US09349801B2Publication Date: 2016-05-24
- Inventor: Mihai Brezeanu , Bogdan-Catalin Serban , Viorel Georgel Dumitru , Octavian Buiu
- Applicant: Honeywell International Inc.
- Applicant Address: US NJ Morris Plains
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morris Plains
- Agency: Schwegman Lundberg & Woessner, P.A.
- Priority: EP14182173 20140825
- Main IPC: H01L29/16
- IPC: H01L29/16 ; G01N27/414 ; H01L29/45
Abstract:
A diamond based oxygen sensor is able to function in harsh environment conditions. The oxygen sensor includes a gateless field effect transistor including a synthetic, quasi-intrinsic, hydrogen-passivated, monocrystalline diamond layer exhibiting a 2-dimension hole gas effect. The oxygen sensor also includes a sensing layer comprising yttrium-stabilized zirconia deposited onto a surface of the gateless field effect transistor.
Public/Granted literature
- US20160056239A1 METHOD AND SYSTEM FOR DIAMOND-BASED OXYGEN SENSOR Public/Granted day:2016-02-25
Information query
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