Invention Grant
- Patent Title: III-n device with dual gates and field plate
- Patent Title (中): 具有双门和场板的III-n设备
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Application No.: US14167843Application Date: 2014-01-29
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Publication No.: US09349805B2Publication Date: 2016-05-24
- Inventor: Yuji Ito , Yuko Matsui , Yoshiyuki Kotani
- Applicant: Transphorm Japan, Inc.
- Applicant Address: JP Yokohama
- Assignee: Transphorm Japan, Inc.
- Current Assignee: Transphorm Japan, Inc.
- Current Assignee Address: JP Yokohama
- Agency: Fish & Richardson P.C.
- Priority: JP2013-114465 20130530
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/20 ; H01L29/778 ; H01L29/40

Abstract:
A semiconductor apparatus includes a substrate; a first semiconductor layer formed on the substrate and formed of a nitride semiconductor; a second semiconductor layer formed on the first semiconductor layer and formed of a nitride semiconductor; first and second gate electrodes, a source electrode, and a drain electrode formed on the second semiconductor layer; an interlayer insulation film formed on the second semiconductor layer; and a field plate formed on the interlayer insulation film. Further, the first gate electrode and the second gate electrode are formed between a region where the source electrode is formed and a region where the field plate is formed, an element isolation region is formed in the first and the second semiconductor layers which are between the first and the second gate electrodes, and the second gate electrode is electrically connected to the source electrode.
Public/Granted literature
- US20140353673A1 SEMICONDUCTOR APPARATUS Public/Granted day:2014-12-04
Information query
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