Invention Grant
- Patent Title: Semiconductor pillar transistors having channels with different crystal orientations
- Patent Title (中): 具有不同晶体取向通道的半导体柱晶体管
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Application No.: US14026241Application Date: 2013-09-13
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Publication No.: US09355908B2Publication Date: 2016-05-31
- Inventor: Masumi Saitoh
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Minato-ku
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-241137 20121031
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/8234 ; H01L29/12 ; H01L29/78 ; H01L27/088 ; H01L29/04 ; H01L27/24 ; H01L29/06

Abstract:
According to an embodiment, a semiconductor device includes an underlying layer and a plurality of transistors. The underlying layer includes a first region and a second region provided adjacently to the first region. The transistors are arranged in a plane parallel to an upper surface of the underlying layer. Each transistor includes a channel allowing a current to flow in a first direction intersecting the plane. The plurality of transistors includes a first transistor provided on the first region and a second transistor provided on the second region, a first channel of the first transistor having a first crystal orientation, and a second channel of the second transistor having a second crystal orientation different from the first crystal orientation.
Public/Granted literature
- US20140117366A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2014-05-01
Information query
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