Invention Grant
- Patent Title: Electromagnetic bandgap structure for three dimensional ICS
- Patent Title (中): 三维ICS的电磁带隙结构
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Application No.: US14264076Application Date: 2014-04-29
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Publication No.: US09355960B2Publication Date: 2016-05-31
- Inventor: Hsieh-Hung Hsieh , Tzu-Jin Yeh , Sa-Lly Liu , Tzong-Lin Wu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: H01L23/538
- IPC: H01L23/538 ; H01L25/065 ; H01L23/48 ; H01L23/522 ; H01L23/00

Abstract:
An electromagnetic bandgap (EBG) cell comprises a plurality of first conductive line layers beneath a first integrated circuit (IC) die, wherein wires on at least one of the first conductive line layers are each connected to one of a high voltage source and a low voltage source and are oriented to form a first mesh structure at a bottom of the EBG cell. The EBG cell further comprises a pair of through-substrate-vias (TSVs) above the plurality of first conductive line layers, wherein the pair of TSVs penetrate the first IC die and are connected to a high voltage source and a low voltage source, respectively, and a pair of micro bumps above a dielectric layer above the pair of TSVs, wherein the micro bumps connect the TSVs of the first IC die with a plurality of second conductive line layers formed on a second IC die.
Public/Granted literature
- US20150311159A1 ELECTROMAGNETIC BANDGAP STRUCTURE FOR THREE DIMENSIONAL ICS Public/Granted day:2015-10-29
Information query
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