Invention Grant
US09356573B2 Piezoelectric thin film resonator, filter and duplexer including a film inserted in the piezoelectric film 有权
压电薄膜谐振器,滤波器和双工器,其包括插入压电薄膜中的薄膜

Piezoelectric thin film resonator, filter and duplexer including a film inserted in the piezoelectric film
Abstract:
A piezoelectric thin film resonator includes: a piezoelectric film provided on a substrate; a lower electrode and an upper electrode sandwiching at least a part of the piezoelectric film and facing with each other; and an inserted film that is inserted in the piezoelectric film, is provided in an outer circumference region of a resonance region and is not provided in a center region of the resonance region, wherein: an angle between an edge face of the lower electrode and a lower face of the lower electrode in the resonance region is an acute angle; and a width of the inserted film in the resonance region on a side for extracting the upper electrode from the resonance region is larger than another width of the inserted film in the resonance region on a side for extracting the lower electrode from the resonance region.
Public/Granted literature
Information query
Patent Agency Ranking
0/0