Invention Grant
US09356573B2 Piezoelectric thin film resonator, filter and duplexer including a film inserted in the piezoelectric film
有权
压电薄膜谐振器,滤波器和双工器,其包括插入压电薄膜中的薄膜
- Patent Title: Piezoelectric thin film resonator, filter and duplexer including a film inserted in the piezoelectric film
- Patent Title (中): 压电薄膜谐振器,滤波器和双工器,其包括插入压电薄膜中的薄膜
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Application No.: US14519803Application Date: 2014-10-21
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Publication No.: US09356573B2Publication Date: 2016-05-31
- Inventor: Tsuyoshi Yokoyama , Tokihiro Nishihara , Takeshi Sakashita
- Applicant: TAIYO YUDEN CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: JP2013-233421 20131111
- Main IPC: H03H9/70
- IPC: H03H9/70 ; H03H9/02 ; H01L41/18 ; H03H9/13 ; H03H9/17 ; H03H9/56

Abstract:
A piezoelectric thin film resonator includes: a piezoelectric film provided on a substrate; a lower electrode and an upper electrode sandwiching at least a part of the piezoelectric film and facing with each other; and an inserted film that is inserted in the piezoelectric film, is provided in an outer circumference region of a resonance region and is not provided in a center region of the resonance region, wherein: an angle between an edge face of the lower electrode and a lower face of the lower electrode in the resonance region is an acute angle; and a width of the inserted film in the resonance region on a side for extracting the upper electrode from the resonance region is larger than another width of the inserted film in the resonance region on a side for extracting the lower electrode from the resonance region.
Public/Granted literature
- US20150130559A1 PIEZOELECTRIC THIN FILM RESONATOR, FILTER AND DUPLEXER Public/Granted day:2015-05-14
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