Invention Grant
- Patent Title: Outer periphery polishing apparatus for disc-shaped workpiece
- Patent Title (中): 盘形工件的外围抛光装置
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Application No.: US14398882Application Date: 2013-02-14
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Publication No.: US09358655B2Publication Date: 2016-06-07
- Inventor: Tadahiro Kato , Akitoshi Enari , Mitsutaka Irago
- Applicant: SHIN-ETSU HANDOTAI CO., LTD. , SPEEDFAM CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedrich LLP
- Priority: JP2012-105785 20120507
- International Application: PCT/JP2013/053485 WO 20130214
- International Announcement: WO2013/168444 WO 20131114
- Main IPC: B24B9/06
- IPC: B24B9/06 ; B24B27/00 ; H01L21/304

Abstract:
[Object] An outer periphery polishing apparatus capable of polishing the edge of workpieces having different bevel angles is to be provided.[Solution] Edge polishing units 2A, 2B for polishing the front surface edge Ea and the rear surface edge Eb of the workpiece W each include a polishing member mounting structure 11 to which a polishing member 10 is attached, a mounting structure support unit 12 that tiltably supports the polishing member mounting structure 11, a mounting structure angle adjustment mechanism 13 that adjusts a tilt angle of the polishing member mounting structure 11, a reciprocation support base 15 that supports the mounting structure support unit 12 so as to move along a reciprocation line, a base support unit 17 that tiltably supports the reciprocation support base 15, a base angle adjustment mechanism 18 that adjusts the tilt angle of the reciprocation support base 15 so as to be parallel to the edge Eb of the workpiece W, and a pedestal 19 that supports the base support unit 17 so as to allow positional correction in a vertical direction and a horizontal direction.
Public/Granted literature
- US20150283664A1 OUTER PERIPHERY POLISHING APPARATUS FOR DISC-SHAPED WORKPIECE Public/Granted day:2015-10-08
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