Invention Grant
- Patent Title: Grinding wheel design with elongated teeth arrangement
- Patent Title (中): 砂轮设计采用细长的牙齿排列
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Application No.: US14724916Application Date: 2015-05-29
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Publication No.: US09358660B2Publication Date: 2016-06-07
- Inventor: Chun-Hsing Su , Jing-Cheng Lin , Tsei-Chung Fu , Wen-Hua Chang , Yi-Chao Mao
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: B24B37/16
- IPC: B24B37/16 ; B24B7/22 ; B24B37/013 ; B24B49/12 ; H01L21/67 ; B24B49/10 ; H01L21/66 ; H01L23/00 ; H01L21/683 ; H01L23/31 ; H01L23/538
Abstract:
A grinding wheel includes a base disk, and a plurality of teeth protruding beyond a surface of the base disk. The plurality of teeth is aligned to an elongated ring encircling a center of the grinding wheel.
Public/Granted literature
- US20150258657A1 Grinding Wheel Design with Elongated Teeth Arrangement Public/Granted day:2015-09-17
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