Invention Grant
US09358750B2 Nanopatterned articles produced using surface-reconstructed block copolymer films
有权
使用表面重构的嵌段共聚物膜制备的纳米图案
- Patent Title: Nanopatterned articles produced using surface-reconstructed block copolymer films
- Patent Title (中): 使用表面重构的嵌段共聚物膜制备的纳米图案
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Application No.: US13944329Application Date: 2013-07-17
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Publication No.: US09358750B2Publication Date: 2016-06-07
- Inventor: Thomas P. Russell , Soojin Park , Jia-Yu Wang , Bokyung Kim
- Applicant: THE UNIVERSITY OF MASSACHUSETTS
- Applicant Address: US MA Boston
- Assignee: THE UNIVERSITY OF MASSACHUSETTS
- Current Assignee: THE UNIVERSITY OF MASSACHUSETTS
- Current Assignee Address: US MA Boston
- Agency: Cantor Colburn LLP
- Main IPC: H01L51/00
- IPC: H01L51/00 ; B32B3/10 ; B81C1/00 ; B82Y30/00

Abstract:
Nanopatterned surfaces are prepared by a method that includes forming a block copolymer film on a substrate, annealing and surface reconstructing the block copolymer film to create an array of cylindrical voids, depositing a metal on the surface-reconstructed block copolymer film, and heating the metal-coated block copolymer film to redistribute at least some of the metal into the cylindrical voids. When very thin metal layers and low heating temperatures are used, metal nanodots can be formed. When thicker metal layers and higher heating temperatures are used, the resulting metal structure includes nanoring-shaped voids. The nanopatterned surfaces can be transferred to the underlying substrates via etching, or used to prepare nanodot- or nanoring-decorated substrate surfaces.
Public/Granted literature
- US20130302632A1 METHOD OF PRODUCING NANOPATTERNED ARTICLES, AND ARTICLES PRODUCED THEREBY Public/Granted day:2013-11-14
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