Invention Grant
US09358784B2 Liquid ejecting head, liquid ejecting apparatus, and method for manufacturing liquid ejecting head 有权
液体喷射头,液体喷射装置和液体喷射头的制造方法

Liquid ejecting head, liquid ejecting apparatus, and method for manufacturing liquid ejecting head
Abstract:
A liquid ejecting head includes a nozzle opening that is formed on one face of a silicon substrate, and ejects liquid, a first concave portion that is provided on the other face of the silicon substrate, and configures a pressure generating chamber which communicates with the nozzle opening, and a second concave portion that is provided on one face of the silicon substrate, and configures a flow path which communicates with the first concave portion and supplies the liquid, in which the first concave portion and the second concave portion overlap each other in an in-plane direction when seen in a direction which is orthogonal to the face of the silicon substrate.
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