Invention Grant
- Patent Title: MEMS microphone with tensioned membrane
- Patent Title (中): 具有张紧膜的MEMS麦克风
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Application No.: US14543676Application Date: 2014-11-17
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Publication No.: US09359188B1Publication Date: 2016-06-07
- Inventor: Sushil Bharatan
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81B3/00 ; B81C1/00 ; H04R23/00
Abstract:
A micro electro-mechanical system (MEMS) microphone is provided. The MEMS microphone is configured to operate at a predetermined range of frequencies. The MEMS microphone has a tensioned membrane preset at a tension amount selected to cause the MEMS microphone to operate at a predetermined sensitivity level that is above a threshold sensitivity level. The tension amount is controlled based on a temperature applied to the tensioned membrane during a fabrication process. At least a portion of the tensioned membrane is sandwiched between a first conductive layer and a second conductive layer configured to equalize stress of the tensioned membrane.
Public/Granted literature
- US20160137486A1 MEMS MICROPHONE WITH TENSIONED MEMBRANE Public/Granted day:2016-05-19
Information query
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