Invention Grant
- Patent Title: Reversible top/bottom MEMS package
- Patent Title (中): 可逆顶/底MEMS封装
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Application No.: US14659693Application Date: 2015-03-17
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Publication No.: US09359191B2Publication Date: 2016-06-07
- Inventor: David Bolognia , Bob Shih-Wei Kuo , Bud Troche
- Applicant: Amkor Technology, Inc.
- Applicant Address: US AZ Tempe
- Assignee: Amkor Technology, Inc.
- Current Assignee: Amkor Technology, Inc.
- Current Assignee Address: US AZ Tempe
- Agency: McAndrews, Held & Malloy
- Main IPC: H01L23/10
- IPC: H01L23/10 ; H01L23/34 ; B81B7/00 ; H01L23/552 ; H01L23/00 ; H01L25/16

Abstract:
Methods and systems for a reversible top/bottom MEMS package may comprise a base substrate comprising metal traces, an opening through the base substrate, a die coupled to a first surface of the substrate and positioned over the opening, a frame member coupled to the first surface of the substrate wherein the die is positioned interior of the frame member, a cover substrate coupled to the frame member, and conductive plating on the frame member that electrically couples the base substrate to the cover substrate, wherein the conductive plating is exposed. The conductive plating may couple a ground plane in the base substrate to a ground plane in the cover substrate. The conductive plating may be exposed at an outer surface of the frame member and/or at an inner perimeter of the frame member. Conductive vias within the frame member may be coupled to the metal traces in the base substrate.
Public/Granted literature
- US20150191346A1 REVERSIBLE TOP/BOTTOM MEMS PACKAGE Public/Granted day:2015-07-09
Information query
IPC分类: