Certain example embodiments relate to methods of making anti-corrosion anti-reflection (ACAR) films, and/or associated coated articles. The methods may involve forming the reaction product of a hydrolysis and/or a condensation reaction of at least one hybrid alkoxide selected from the group consisting of Si(OR)4—Al(s-OBu)3, Si(OR)4—B(OBu)3 and Si(OR)4 and Zr(OBu)4, where R is a CH2CH3 group, s-OBu is sec-butoxide and OBu is n-butoxide. The solution optionally may be blended and/or mixed with silicon nanoparticles and/or siloxanes. A Tqe % gain of about 3.2% and/or refractive index of 1.5 or less is/are possible in certain example embodiments.