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US09359668B2 Feeder system and method for a vapor transport deposition system 有权
用于蒸气输送沉积系统的送料系统和方法

Feeder system and method for a vapor transport deposition system
Abstract:
An improved feeder system and method for a vapor transport deposition system that includes a carrier gas bypass flow line to allow for continuous carrier gas flow to a vaporizer unit when a vibratory unit which supplies powdered material and carrier gas to the vaporizer unit is out of service. A process gas flow line to the vibratory unit may be included when the powdered material contains a powdered dopant in the material mix.
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