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US09359691B2 Method of loading a charge of polysilicon into a crucible 有权
将多晶硅装入坩埚的方法

Method of loading a charge of polysilicon into a crucible
Abstract:
A method of loading a crucible includes loading a first layer of polysilicon chunks into the crucible and loading a second layer of granular polysilicon into the crucible to form a polysilicon charge such that the packing density of the polysilicon charge within the crucible is greater than 0.70.
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