Invention Grant
- Patent Title: Three-dimensional profile measurement apparatus and method using amplitude size of projection grid
- Patent Title (中): 三维轮廓测量装置和使用投影网格幅度的方法
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Application No.: US14343052Application Date: 2012-09-07
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Publication No.: US09360306B2Publication Date: 2016-06-07
- Inventor: Yoon Deok Park
- Applicant: Yoon Deok Park
- Applicant Address: KR Asan-si, Chungcheongnam-do
- Assignee: INSPECTO INC.
- Current Assignee: INSPECTO INC.
- Current Assignee Address: KR Asan-si, Chungcheongnam-do
- Agency: Revolution IP, PLLC
- Priority: KR10-2011-0092042 20110909; KR10-2012-0099230 20120907
- International Application: PCT/KR2012/007233 WO 20120907
- International Announcement: WO2013/036076 WO 20130314
- Main IPC: G01B11/30
- IPC: G01B11/30 ; G01J1/00 ; G01B11/00 ; G03F9/00 ; G03C5/00 ; G03B27/58 ; G03B27/54 ; G03B27/42 ; G01B11/25
Abstract:
Disclosed are a three-dimensional profile measurement apparatus and method using the amplitude size of a projection grid wherein a periodic pattern of the projection grid is projected onto an object to be measured, the amplitude of the projection grid is obtained through the change of the pattern of the projection grid, and the amplitude size is continuously obtained while moving the object upwards and downwards, thus measuring the three-dimensional profile of the object.
Public/Granted literature
- US20140198320A1 THREE-DIMENSIONAL PROFILE MEASUREMENT APPARATUS AND METHOD USING AMPLITUDE SIZE OF PROJECTION GRID Public/Granted day:2014-07-17
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