Invention Grant
- Patent Title: Multiple sense axis MEMS gyroscope having a single drive mode
- Patent Title (中): 具有单驱动模式的多感测轴MEMS陀螺仪
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Application No.: US14019066Application Date: 2013-09-05
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Publication No.: US09360319B2Publication Date: 2016-06-07
- Inventor: Kemiao Jia
- Applicant: FREESCALE SEMICONDUCTOR, INC.
- Applicant Address: US TX Austin
- Assignee: Freescale Semiconductor, Inc.
- Current Assignee: Freescale Semiconductor, Inc.
- Current Assignee Address: US TX Austin
- Agent Charlene R. Jacobsen
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5747

Abstract:
A gyroscope includes a first drive mass driven in a first drive motion along a first axis, the first drive motion generating a first sense motion of a first sense mass in response to rotation of the gyroscope. The gyroscope further includes a second drive mass driven in a second drive motion along a second axis that is transverse to the first axis. The second drive motion generates a second sense motion of a second sense mass in response to rotation of the gyroscope. A drive spring system interconnects the two drive masses to couple the first and second drive motions so that a single drive mode can be implemented. The sense motion of each sense mass is along a third axis, where the third axis is transverse to the other axes. The sense motion is translational motion such the sense masses remain parallel to the surface of the substrate.
Public/Granted literature
- US20150059473A1 MULTIPLE SENSE AXIS MEMS GYROSCOPE HAVING A SINGLE DRIVE MODE Public/Granted day:2015-03-05
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