Invention Grant
- Patent Title: Two-dimensional encoder system and method
- Patent Title (中): 二维编码器系统及方法
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Application No.: US14449371Application Date: 2014-08-01
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Publication No.: US09360347B2Publication Date: 2016-06-07
- Inventor: Eric Peter Goodwin , Daniel Gene Smith
- Applicant: Nikon Corporation
- Applicant Address: JP Konan, Minato-ku, Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Konan, Minato-ku, Tokyo
- Agency: Quarles & Brady LLP
- Agent Yakov Sidorin
- Main IPC: G01D5/38
- IPC: G01D5/38 ; G01D5/347 ; G01B11/00 ; G02B27/42 ; G03F7/20 ; G02B5/18
Abstract:
Two dimensional encoder system and method designed to improve accuracy, compactness, stability, resolution, and/or light efficiency of metrology carried out with such system and method. Embodiments employ a novel retroreflector which while particularly useful in present invention, is believed to have more general utility in optical imaging systems and methods.
Public/Granted literature
- US20140374579A1 TWO-DIMENSIONAL ENCODER SYSTEM AND METHOD Public/Granted day:2014-12-25
Information query
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