Invention Grant
US09360387B2 Pressure sensor chip 有权
压力传感器芯片

Pressure sensor chip
Abstract:
A pressure sensor chip is provided with first and second retaining members. The peripheral edge portions of the first and second retaining members are bonded to face one face and another face of a diaphragm, respectively. An inner edge of the peripheral edge portion of the first retaining member is positioned further to the outside than an inner edge of the peripheral edge portion of the second retaining member.
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