Invention Grant
- Patent Title: Multi-axis tilt sensor for correcting gravitational effects on the measurement of pressure by a capacitance diaphragm gauge
- Patent Title (中): 多轴倾斜传感器,用于通过电容隔膜计校正重力测量压力的重力
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Application No.: US14497134Application Date: 2014-09-25
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Publication No.: US09360391B2Publication Date: 2016-06-07
- Inventor: David J. Ferran , Robert J. Ferran
- Applicant: Ferran Technology, Inc.
- Applicant Address: US CA San Diego
- Assignee: Ferran Technology, Inc.
- Current Assignee: Ferran Technology, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Patterson Intellectual Property Law, P.C.
- Agent Jerry Turner Sewell
- Main IPC: G01L27/00
- IPC: G01L27/00 ; G01L9/00 ; G01L19/02

Abstract:
A system and method compensate for effects of gravity on the diaphragm of a capacitance diaphragm gauge (CDG). The CDG generates a measured absolute pressure value in response to an applied absolute pressure on an input of the CDG. The CDG is subjected to a variable orientation of the CDG with respect to the earth's surface that can cause inaccurate pressure measurements. A pressure measuring circuit generates a measured value of an applied absolute pressure provided to an input of the CDG. A tilt sensor generates at least one tilt sensor output value that is responsive to an orientation of the CDG with respect to the earth's surface. A processing system adjusts the measured absolute pressure value by a calibration factor to generate a calibrated absolute pressure value representing the applied absolute pressure, wherein the calibration factor is selected in response to the at least one tilt sensor output value.
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