Invention Grant
- Patent Title: Method and apparatus for producing a Fresnel zone plate
- Patent Title (中): 用于制造菲涅耳带板的方法和装置
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Application No.: US13501327Application Date: 2010-10-15
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Publication No.: US09360603B2Publication Date: 2016-06-07
- Inventor: Gisela Schuetz , Corinne Grévent , Marcel Mayer , Brigitte Baretzky
- Applicant: Gisela Schuetz , Corinne Grévent , Marcel Mayer , Brigitte Baretzky
- Applicant Address: DE Munich
- Assignee: Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V.
- Current Assignee: Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V.
- Current Assignee Address: DE Munich
- Agency: Lathrop & Gage LLP
- Priority: DE102009050688 20091026; DE102010010937 20100311
- International Application: PCT/EP2010/065492 WO 20101015
- International Announcement: WO2011/054651 WO 20110512
- Main IPC: G02B5/18
- IPC: G02B5/18 ; C23C16/455 ; G21K1/06

Abstract:
A method of producing a Fresnel zone plate (15) comprising: making available a substrate (1, 4, 7) which is rotationally symmetrical with respect to its center axis (1a, 4a, 7a); applying layers (2a-d; 5a-d; 8a-d; 11) following in succession by means of an atomic layer deposition (ALD) method to faces (1b-c; 4b-c; 7b-c) of the substrate (1, 4, 7) without rotation of the substrate (1, 4, 7) in order to form a coated substrate, and severing (3a, b; 6a, b; 9a, b) at least one slice (13) from the coated substrate (1, 4, 7), by the coated substrate (1, 4, 7) being divided at least once at a right angle to the center axis (1a, 4a, 7a).
Public/Granted literature
- US20120258243A1 METHOD AND APPARATUS FOR PRODUCING A FRESNEL ZONE PLATE Public/Granted day:2012-10-11
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