Invention Grant
- Patent Title: Electrostatic clamp, lithographic apparatus, and device manufacturing method
- Patent Title (中): 静电夹具，光刻设备和器件制造方法
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Application No.: US14005686Application Date: 2012-02-07
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Publication No.: US09360771B2Publication Date: 2016-06-07
- Inventor: Eugene Maria Brinkhof , Jan Bex , Anko Jozef Cornelus Sijben , Johannes Wilhelmus Damen
- Applicant: Eugene Maria Brinkhof , Jan Bex , Anko Jozef Cornelus Sijben , Johannes Wilhelmus Damen
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- International Application: PCT/EP2012/052044 WO 20120207
- International Announcement: WO2012/123188 WO 20120920
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01L21/683
Abstract:
An electrostatic clamp for use in holding an object onto a supporting table, the electrostatic clamp comprising: a multi-layer film comprising an electrode defined in an electrically conducting layer which is positioned between electrically insulating layers.
Public/Granted literature
- US20140218711A1 Electrostatic Clamp, Lithographic Apparatus, and Device Manufacturing Method Public/Granted day:2014-08-07
Information query
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