Invention Grant
- Patent Title: Vertical cavity surface emitting laser and atomic oscillator
- Patent Title (中): 垂直腔表面发射激光和原子振荡器
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Application No.: US14573293Application Date: 2014-12-17
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Publication No.: US09360845B2Publication Date: 2016-06-07
- Inventor: Tsuyoshi Kaneko , Tetsuo Nishida , Yuji Kurachi
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2013-263458 20131220
- Main IPC: H01S5/00
- IPC: H01S5/00 ; G04F5/14 ; H01S5/183 ; H03L7/26 ; H01S5/042

Abstract:
A vertical cavity surface emitting laser includes: a substrate; and a laminated body which is provided over the substrate, wherein the laminated body includes a first mirror layer provided over the substrate, an active layer provided over the first mirror layer, and a second mirror layer provided over the active layer, in a plan view, the laminated body includes a first portion having a first width, a second portion having a second width, and a third portion which is provided between the first portion and the second portion and has a third width wider than the first width or the second width, and a resin layer which covers at least one portion of the first portion is provided.
Public/Granted literature
- US20150180208A1 VERTICAL CAVITY SURFACE EMITTING LASER AND ATOMIC OSCILLATOR Public/Granted day:2015-06-25
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