Invention Grant
US09360845B2 Vertical cavity surface emitting laser and atomic oscillator 有权
垂直腔表面发射激光和原子振荡器

Vertical cavity surface emitting laser and atomic oscillator
Abstract:
A vertical cavity surface emitting laser includes: a substrate; and a laminated body which is provided over the substrate, wherein the laminated body includes a first mirror layer provided over the substrate, an active layer provided over the first mirror layer, and a second mirror layer provided over the active layer, in a plan view, the laminated body includes a first portion having a first width, a second portion having a second width, and a third portion which is provided between the first portion and the second portion and has a third width wider than the first width or the second width, and a resin layer which covers at least one portion of the first portion is provided.
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