Invention Grant
US09361424B2 Integrated circuit layout design methodology with process variation bands
有权
具有过程变化带的集成电路布局设计方法
- Patent Title: Integrated circuit layout design methodology with process variation bands
- Patent Title (中): 具有过程变化带的集成电路布局设计方法
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Application No.: US14451091Application Date: 2014-08-04
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Publication No.: US09361424B2Publication Date: 2016-06-07
- Inventor: Juan Andres Torres Robles
- Applicant: Mentor Graphics Corporation
- Applicant Address: US OR Wilsonville
- Assignee: Mentor Graphics Corporation
- Current Assignee: Mentor Graphics Corporation
- Current Assignee Address: US OR Wilsonville
- Agency: Klarquist Sparkman, LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/36

Abstract:
A system for analyzing IC layouts and designs by calculating variations of a number of objects to be created on a semiconductor wafer as a result of different process conditions. The variations are analyzed to determine individual feature failures or to rank layout designs by their susceptibility to process variations. In one embodiment, the variations are represented by PV-bands having an inner edge that defines the smallest area in which an object will always print and an outer edge that defines the largest area in which an object will print under some process conditions.
Public/Granted literature
- US20150067618A1 INTEGRATED CIRCUIT LAYOUT DESIGN METHODOLOGY WITH PROCESS VARIATION BANDS Public/Granted day:2015-03-05
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