Invention Grant
- Patent Title: Shielded lid heater assembly
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Application No.: US13793501Application Date: 2013-03-11
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Publication No.: US09362148B2Publication Date: 2016-06-07
- Inventor: Michael D. Willwerth , David Palagashvili , Valentin N. Todorow , Stephen Yuen
- Applicant: Michael D. Willwerth , David Palagashvili , Valentin N. Todorow , Stephen Yuen
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: H01L21/306
- IPC: H01L21/306 ; C23C16/00 ; H01L21/67 ; H01J37/32 ; H05B6/10
Abstract:
A shielded lid heater lid heater suitable for use with a plasma processing chamber, a plasma processing chamber having a shielded lid heater and a method for plasma processing are provided. The method and apparatus enhances positional control of plasma location within a plasma processing chamber, and may be utilized in etch, deposition, implant, and thermal processing systems, among other applications where the control of plasma location is desirable. In one embodiment, a shielded lid heater is provided that includes an aluminum base and RF shield sandwiching a heater element.
Public/Granted literature
- US20130189848A1 SHIELDED LID HEATER ASSEMBLY Public/Granted day:2013-07-25
Information query
IPC分类:
