Invention Grant
US09362190B2 Semiconductor element, semiconductor device including the same, and method for manufacturing semiconductor element 有权
包含该半导体元件的半导体元件,半导体器件以及半导体元件的制造方法

Semiconductor element, semiconductor device including the same, and method for manufacturing semiconductor element
Abstract:
To provide a semiconductor element that can have the high adhesion between a substrate made of an oxide or the like and a metal film, a semiconductor element includes a substrate made of an oxide, a semiconductor element structure provided on an upper surface of the substrate, and a metal film provided on a lower surface of the substrate, in which the metal film contains nanoparticles made of an oxide.
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