Invention Grant
- Patent Title: Method for manufacturing a multilayer structure on a substrate
- Patent Title (中): 在基板上制造多层结构的方法
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Application No.: US14369701Application Date: 2012-12-27
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Publication No.: US09362255B2Publication Date: 2016-06-07
- Inventor: Umberto Rossini , Thierry Flahaut , Vincent Larrey
- Applicant: Commissariat à l'énergie atomique et aux énergies alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Brannon Sowers & Cracraft PC
- Agent Kevin R Erdman
- Priority: FR1162525 20111229
- International Application: PCT/FR2012/053089 WO 20121227
- International Announcement: WO2013/098528 WO 20130704
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L23/00 ; H01L21/20 ; H01L21/762
Abstract:
The invention relates to a method for manufacturing a multilayer strucute on a first substrate, the method including: using the first substrate made of a first material having a Young's modulus Ev and a thickness ev, and using a second substrate covered by the multilayer structure, the second substrate being made of a second material having a Young's modulus Es that is different from the Young's modulus Ev and a thickness es, the thicknesses es and ev complying, plus or minus 10%, with the relation (I); molecularly bonding the first substrate and the multilayer structure together; and removing the second substrate.
Public/Granted literature
- US20140353853A1 METHOD FOR MANUFACTURING A MULTILAYER STRUCTURE ON A SUBSTRATE Public/Granted day:2014-12-04
Information query
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