Invention Grant
- Patent Title: Fin field effect transistor and method for forming the same
- Patent Title (中): Fin场效应晶体管及其形成方法
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Application No.: US14574639Application Date: 2014-12-18
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Publication No.: US09362286B2Publication Date: 2016-06-07
- Inventor: Mieno Fumitake , Jianhua Ju
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Shanghai
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee Address: CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201310698747 20131218
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/70 ; H01L21/8238 ; H01L21/336 ; H01L27/092 ; H01L29/78

Abstract:
Various embodiments provide semiconductor devices and methods for forming the same. A first fin and a second fin are formed on a semiconductor substrate. A first dielectric layer is formed on the semiconductor substrate and has a top surface lower than a top surface of both of the first fin and the second fin. A gate structure is formed on the first dielectric layer and covering across a first portion of each of the first fin and the second fin. A second portion of the first fin on both sides of the gate structure is removed, forming a first recess. A first semiconductor layer is formed in the first recess. A second dielectric layer is formed on the first dielectric layer and the first semiconductor layer, and exposes a top surface of the second fin. A second semiconductor layer is formed on the exposed top surface of the second fin.
Public/Granted literature
- US20150171085A1 FIN FIELD EFFECT TRANSISTOR AND METHOD FOR FORMING THE SAME Public/Granted day:2015-06-18
Information query
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