Invention Grant
- Patent Title: Methods for forming backside illuminated image sensors with front side metal redistribution layers and a permanent carrier layer
- Patent Title (中): 用前侧金属再分布层和永久性载体层形成背面照明图像传感器的方法
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Application No.: US14215975Application Date: 2014-03-17
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Publication No.: US09362330B2Publication Date: 2016-06-07
- Inventor: Swarnal Borthakur , Kevin W. Hutto , Andrew Perkins , Marc Sulfridge
- Applicant: Semiconductor Components Industries, LLC
- Applicant Address: US AZ Phoenix
- Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee Address: US AZ Phoenix
- Agency: Treyz Law Group, P.C.
- Main IPC: H01L31/00
- IPC: H01L31/00 ; H01L27/146 ; H01L31/0203 ; H01L31/20 ; H01L31/0224

Abstract:
Methods for forming backside illuminated (BSI) image sensors having metal redistribution layers (RDL) and solder bumps for high performance connection to external circuitry are provided. In one embodiment, a BSI image sensor with RDL and solder bumps may be formed using a temporary carrier during manufacture that is removed prior to completion of the BSI image sensor. In another embodiment, a BSI image sensor with RDL and solder bumps may be formed using a permanent carrier during manufacture that partially remains in the completed BSI image sensor. A BSI image sensor may be formed before formation of a redistribution layer on the front side of the BSI image sensor. A redistribution layer may, alternatively, be formed on the front side of an image wafer before formation of BSI components such as microlenses and color filters on the back side of the image wafer.
Public/Granted literature
- US20140197511A1 METHODS FOR FORMING BACKSIDE ILLUMINATED IMAGE SENSORS WITH FRONT SIDE METAL REDISTRIBUTION LAYERS Public/Granted day:2014-07-17
Information query
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