Invention Grant
US09362330B2 Methods for forming backside illuminated image sensors with front side metal redistribution layers and a permanent carrier layer 有权
用前侧金属再分布层和永久性载体层形成背面照明图像传感器的方法

Methods for forming backside illuminated image sensors with front side metal redistribution layers and a permanent carrier layer
Abstract:
Methods for forming backside illuminated (BSI) image sensors having metal redistribution layers (RDL) and solder bumps for high performance connection to external circuitry are provided. In one embodiment, a BSI image sensor with RDL and solder bumps may be formed using a temporary carrier during manufacture that is removed prior to completion of the BSI image sensor. In another embodiment, a BSI image sensor with RDL and solder bumps may be formed using a permanent carrier during manufacture that partially remains in the completed BSI image sensor. A BSI image sensor may be formed before formation of a redistribution layer on the front side of the BSI image sensor. A redistribution layer may, alternatively, be formed on the front side of an image wafer before formation of BSI components such as microlenses and color filters on the back side of the image wafer.
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