The present invention relates to an energy harvester device comprising an elongate resonator beam extending between first and second ends. A base connected to the resonator beam at the first end with the second end being freely extending from the base as a cantilever. A mass is attached to the second end of the elongate resonator beam. The elongate resonator beam comprises either: (1) a first oxide layer on a first piezoelectric stack layer over a cantilever layer on a second oxide layer over a second piezoelectric stack layer on a third oxide layer or (2) a first oxide layer on a first piezoelectric stack layer over a second oxide layer on a cantilever layer over a third oxide layer on a second piezoelectric stack over a fourth oxide layer. Also disclosed is a system comprising an electrically powered apparatus and the energy harvester device, as well as methods of making and using the energy harvester.