Invention Grant
- Patent Title: Columnar crystal containing light emitting element and method of manufacturing the same
- Patent Title (中): 含有发光元件的柱状晶体及其制造方法
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Application No.: US11574386Application Date: 2005-08-30
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Publication No.: US09362717B2Publication Date: 2016-06-07
- Inventor: Akihiko Kikuchi , Katsumi Kishino
- Applicant: Akihiko Kikuchi , Katsumi Kishino
- Applicant Address: JP Tokyo
- Assignee: SOPHIA SCHOOL CORPORATION
- Current Assignee: SOPHIA SCHOOL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2004-253267 20040831
- International Application: PCT/JP2005/015799 WO 20050830
- International Announcement: WO2006/025407 WO 20060309
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01S5/183 ; B82Y20/00 ; C30B25/02 ; C30B29/16 ; C30B29/40 ; C30B29/60 ; C30B23/00 ; H01L21/02 ; H01L33/08 ; H01S5/02 ; H01S5/04 ; H01S5/32 ; H01S5/34 ; H01S5/343 ; H01L33/18
Abstract:
A method of manufacturing a semiconductor element by forming, on a substrate, columnar crystals of a nitride-base or an oxide-base compound semiconductor, and by using the columnar crystals, wherein on the surface of the substrate, the columnar crystals are grown while ensuring anisotropy in the direction of c-axis, by controlling ratio of supply of Group-III atoms and nitrogen, or Group-II atoms and oxygen atoms, and temperature of crystal growth, so as to suppress crystal growth in the lateral direction on the surface of the substrate.
Public/Granted literature
- US20070248132A1 Light Emitting Element and Method of Manufacturing the Same Public/Granted day:2007-10-25
Information query
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